MICROSCOPIC DEVICE

PURPOSE:To move automatically the prescribed position of a substrate into the visual field of observation without using a prealignment by converting a substrate coordinate system to a stage coordinate system in accordance with a conversion equation and controlling an X-Y stage with converted coordinate values. CONSTITUTION:Coordinate values in the substrate coordinate system of a prescribed position on a wafer 1 are stored in a storage means 14. The conversion equation between the substrate coordinate system and the stage coordinate system is stored in an arithmetic storage means 13. Contents of storage means 13 and 14 are inputted to a converting means 15, and the coordinate values of the substrate coordinate system are converted to those of the stage coordinate system, and X-direction and Y-direction motors 5 and 9 are driven and controlled by the converted coordinate values. Thus, the prescribed position on the wafer is automatically brought into the visual field of an observing device 11 even through the wafer 1 is placed on a stage 2 without prealignment.