FLUID CONTROL VALVE

PURPOSE:To obtain a compact and long-life fluid control valve which is improved in responsiveness and opening adjustability, and may control even a large amount of fluid flow, by driving to depress a valve member for opening and closing a valve port by a strain force of a piezostack. CONSTITUTION:A...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHIMIZU TETSUO, TSUJIMURA KIYOHARU, IWAMOTO MICHINORI
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:PURPOSE:To obtain a compact and long-life fluid control valve which is improved in responsiveness and opening adjustability, and may control even a large amount of fluid flow, by driving to depress a valve member for opening and closing a valve port by a strain force of a piezostack. CONSTITUTION:A valve member 6 for opening and closing a valve port 3a is driven to be depressed through a diaphragm 7. The diaphragm 7 is driven to be depressed by a piezostack 8 provided in a cylindrical member 2. The piezostack 8 is provided with a depressing portion 9 contacting with the diaphragm 7 to transmit a strain force of the piezostack 8 to the valve member 6. The strain force is generated by applying a predetermined voltage to the piezostack 8 to let the depressing portion 9 depress the valve member 6 downwardly and thereby adjust an opening degree of the valve port 3a.