CEILING VARIABLE TYPE CLEAN ROOM

PURPOSE:To make a flexible accommodation for a variation in composition of lines by a method wherein a filter ceiling of a clean room is divided into several sections as the filter ceiling is indexed and each of them is made as a unit. CONSTITUTION:A filter ceiling B of a clean room A is divided int...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OTOMO TETSUAKI, RO SHIYUNMIN, UNNO KENICHI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To make a flexible accommodation for a variation in composition of lines by a method wherein a filter ceiling of a clean room is divided into several sections as the filter ceiling is indexed and each of them is made as a unit. CONSTITUTION:A filter ceiling B of a clean room A is divided into several sections as the filter is indexed and each of them is made as a super-high performance filter type air supplying unit 1... (hereinafter defined as an air supplying unit), their air supplying units are made such that each of them has a cylinder 11 of rectangular section, super-high performance filters 12 are fixed to the lower ends of the cylinders and at the same time blowers 13 are arranged in them. These air supplying units 1... are provided with a chain, rope, jack, rack, pinion, screw rod, telescopic assembly or the like to form a proper lifting device at the ceiling chamber C, thereby the unit can be lifted up or descended down.