METHOD FOR SIZE MEASUREMENT AND TEMPERATURE COMPENSATION

PURPOSE:To measure size speedily and accurately at standard temperature before a temperature sensor and a body to be measured become equal in temperature and when temperature and size are measured at different time by calculating the temperature of the object body from the variation rate of the output of the temperature sensor and correcting the size measured value. CONSTITUTION:The temperature sensor 32 is brought into contact with the body 13 to be measured to obtain the output of the sensor at the 1st time and the 2nd time and the size of the body 13 at the 3rd time within a section where the output of the sensor 32 attains to the temperature of the body 13. The variation rate of the sensor 32 between the 1st time and the 2nd time is calculated to calculate the temperature of the body 13, and the temperature of the body 13 at the 3rd time is calculated from the temperature difference between the 2nd time and the 3rd time. Then, the size measured value of the body 13 is corrected with the difference between the temperature of the body 13 at the 3rd time and standard temperature. Consequently, the size of the body 13 is at the standard temperature is measured speedily and accurately before the temperature of the sensor 32 attains to that of the body 13 and even if the temperature and size are measured at different time.