COMPENSATION CIRCUIT OF SEMICONDUCTIVE PRESSURE SENSOR

PURPOSE:To eliminate the necessity for providing a separate compensation table at every indivisual pressure sensor, in a compensation circuit for processing the detection output of a bridge circuit while converting the same to digital data, by mounting function for forming a compensation table for itself. CONSTITUTION:In order to impart compensation table forming function, pressure sensor units 10 are arranged in a test tank at the point of time when a manufacturing process was finished. A computer 25 issues an order to a temp./pressure controller 24 to variously change the temp. and pressure in the test tank 21 and supplies reference data BD showing the accurate temp. and pressure in the test tank 21 to each pressure sensor unit 10 through a terminal 16. Each of the pressure sensor units 10 has pressure data correcting function and corrects pressure data PD containing an error on the basis of the tables TB1, TB2 in memory 18c when actual pressure is measured and outputs the same as accurate pressure data LPD containing no error.