CRYOPUMP
PURPOSE:To reduce the size and weight of a support frame and the consumption of liquefied nitrogen, by interposing hard-plated thin metal sheets between the support frame and a shield and between the support frame and a chevron baffle. CONSTITUTION:Thin metal sheets 10, 11 plated with hard films are...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To reduce the size and weight of a support frame and the consumption of liquefied nitrogen, by interposing hard-plated thin metal sheets between the support frame and a shield and between the support frame and a chevron baffle. CONSTITUTION:Thin metal sheets 10, 11 plated with hard films are interposed between a support frame 5 and a shield 6 and between the support frame and a chevron baffle 7, so as to absorb the thermal expansive force between the support frame and the shield and that between the support frame and the chevron baffle. This constitution enables the reduction in the size and weight of the support frame 5 and that in the consumption of cooling liquefied nitrogen. |
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