JOINING DEVICE FOR CLEAN SURFACE

PURPOSE:To provide a series of joining devices having high efficiency by subjecting materials to be welded to cleaning and coating in a vacuum, bringing the materials through a target by a carriage into the succeeding assembling chamber, combining the surface to be joined to face each other and feeding further the materials through targets into a heating press chamber. CONSTITUTION:Materials to be joined placed on a targer 18 are held by a manipulator 17 in a vacuum chamber 3 and are subjected to cleaning and coating by an ion beam gun 15. The state thereof is inspected by a mass spectrograph 16 for deciding cleanliness. The accepted materials are carried through a target 10b by a carriage 9 into an assembling chamber 2. The two materials to be joined are assembled to mate the joint surfaces thereof by upper 11, lower 13 and horizontal 12 manipulators and further the materials are fed through a target 10a by the carriage 9 into a diffusion joining chamber 1 where the materials are subjected to heating and compressive joining. A series of such operations are accomplished in the vacuum chambers connected by the targets 10a, 10b by which the operating efficiency is considerably improved.