PELLICLE

PURPOSE:To prevent an adhesive agent from remaining on a mask base plate as a foreign matter in the stage of adhering a pellicle frame to the mask base plate by forming the surface of an adhesive agent layer to be adhered with the mask base plate in way as to have the adhesion power weaker than the surface to be adhered with the pellicle frame. CONSTITUTION:A transparent pellicle film 2 is adhered to one end side of a pellicle frame 1 consisting of an annular frame body and the opposite end face of the frame 1 is adhered by an adhesive agent 3 to the surface of a mask substrate 4 which is formed of glass or the like and on which surface a pattern 5 is formed. The adhesive agent 3 in this stage is formed of two layers of adhesive agent layers having different adhesion powers, i.e., a double-coated tape material 3c provided with the strong adhesive power layer 3a on the frame 1 side and the weak adhesive power layer 3b on the mask base plate side 4. An equally good result is also obtd. by forming the adhesive agent layer of one adhesive agent layer and treating the surface 3e of the adhesive agent layer to be adhered with the mask base plate so as to have the adhesion power weaker than the adhesion power of the surface 3d to be adhered with the pellicle frame.