OPTICAL AUTOMATIC POSITIONER

PURPOSE:To improve accuracy, by providing two grid plates on each of two substrates, and setting in such a way that, when these substrates are positioned in the specified positions, a phase difference of moire signals by laser rays flashed to each grid plate becomes 90 deg.. CONSTITUTION:Grid plates...

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Bibliographische Detailangaben
Hauptverfasser:	HATSUTORI SHIYUUZOU, UCHIDA ETSUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TARIFF METERING APPARATUS TESTING
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Beschreibung
Zusammenfassung:	PURPOSE:To improve accuracy, by providing two grid plates on each of two substrates, and setting in such a way that, when these substrates are positioned in the specified positions, a phase difference of moire signals by laser rays flashed to each grid plate becomes 90 deg.. CONSTITUTION:Grid plates A, B are placed between opposedly installed substrates 1, 2, laser rays L are flashed from a source S. The laser rays after passing through the grid plates A, B are detected by photoelectric detector C and the substrates 1, 2 are positioned by comparators Dx, Dy, controllers Ex, Ey, actuators Fx, Fy basing on the detected moire signals. On the substrates A, B, two refraction grating areas per each coordinate directions 3, 4, 5, 6 are installed and each grating area is so set that, the phase difference obtained at the moment when it is positioned in the target position becomes 90 deg.. By this arrangement the positioning accuracy is improved.