X-RAY ANALYZING APPARATUS USING ELECTRON BEAM

X-RAY ANALYZING APPARATUS USING ELECTRON BEAM

PURPOSE:To perform accurate surface analysis even though irregularity is present on the surface of a sample, by judging the height of the position of the sample surface at every time the surface analysis of each minute surface is performed, and adjusting the height. CONSTITUTION:A detecting means 18...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: SATOU MITSUYOSHI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator SATOU MITSUYOSHI
description PURPOSE:To perform accurate surface analysis even though irregularity is present on the surface of a sample, by judging the height of the position of the sample surface at every time the surface analysis of each minute surface is performed, and adjusting the height. CONSTITUTION:A detecting means 18 detects the polarity of a minute surface 4a in the vertical direction based on the X ray intensity data of each minute surface of a sample 4. A position adjusting means 15 performs the position adjustment of the surface of a sample 4 in the vertical direction. A control means 19 controls the means 15 every time the X ray data of each minute surface 4a is obtained, so that the position adjustment of the sample 4 in the vertical direction is performed in response to the detected result of the means 18.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JPS6064238A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JPS6064238A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JPS6064238A3</originalsourceid><addsrcrecordid>eNrjZNCN0A1yjFRw9HP0iYzy9HNXcAwIcAxyDAkNVggNBvFdfVydQ4L8_RScXB19eRhY0xJzilN5oTQ3g4Kba4izh25qQX58anFBYnJqXmpJvFdAsJmBmYmRsYWjMRFKAIOnJWo</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>X-RAY ANALYZING APPARATUS USING ELECTRON BEAM</title><source>esp@cenet</source><creator>SATOU MITSUYOSHI</creator><creatorcontrib>SATOU MITSUYOSHI</creatorcontrib><description>PURPOSE:To perform accurate surface analysis even though irregularity is present on the surface of a sample, by judging the height of the position of the sample surface at every time the surface analysis of each minute surface is performed, and adjusting the height. CONSTITUTION:A detecting means 18 detects the polarity of a minute surface 4a in the vertical direction based on the X ray intensity data of each minute surface of a sample 4. A position adjusting means 15 performs the position adjustment of the surface of a sample 4 in the vertical direction. A control means 19 controls the means 15 every time the X ray data of each minute surface 4a is obtained, so that the position adjustment of the sample 4 in the vertical direction is performed in response to the detected result of the means 18.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PHYSICS ; TESTING</subject><creationdate>1985</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19850412&amp;DB=EPODOC&amp;CC=JP&amp;NR=S6064238A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,781,886,25568,76551</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19850412&amp;DB=EPODOC&amp;CC=JP&amp;NR=S6064238A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SATOU MITSUYOSHI</creatorcontrib><title>X-RAY ANALYZING APPARATUS USING ELECTRON BEAM</title><description>PURPOSE:To perform accurate surface analysis even though irregularity is present on the surface of a sample, by judging the height of the position of the sample surface at every time the surface analysis of each minute surface is performed, and adjusting the height. CONSTITUTION:A detecting means 18 detects the polarity of a minute surface 4a in the vertical direction based on the X ray intensity data of each minute surface of a sample 4. A position adjusting means 15 performs the position adjustment of the surface of a sample 4 in the vertical direction. A control means 19 controls the means 15 every time the X ray data of each minute surface 4a is obtained, so that the position adjustment of the sample 4 in the vertical direction is performed in response to the detected result of the means 18.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1985</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNCN0A1yjFRw9HP0iYzy9HNXcAwIcAxyDAkNVggNBvFdfVydQ4L8_RScXB19eRhY0xJzilN5oTQ3g4Kba4izh25qQX58anFBYnJqXmpJvFdAsJmBmYmRsYWjMRFKAIOnJWo</recordid><startdate>19850412</startdate><enddate>19850412</enddate><creator>SATOU MITSUYOSHI</creator><scope>EVB</scope></search><sort><creationdate>19850412</creationdate><title>X-RAY ANALYZING APPARATUS USING ELECTRON BEAM</title><author>SATOU MITSUYOSHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JPS6064238A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1985</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>SATOU MITSUYOSHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SATOU MITSUYOSHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>X-RAY ANALYZING APPARATUS USING ELECTRON BEAM</title><date>1985-04-12</date><risdate>1985</risdate><abstract>PURPOSE:To perform accurate surface analysis even though irregularity is present on the surface of a sample, by judging the height of the position of the sample surface at every time the surface analysis of each minute surface is performed, and adjusting the height. CONSTITUTION:A detecting means 18 detects the polarity of a minute surface 4a in the vertical direction based on the X ray intensity data of each minute surface of a sample 4. A position adjusting means 15 performs the position adjustment of the surface of a sample 4 in the vertical direction. A control means 19 controls the means 15 every time the X ray data of each minute surface 4a is obtained, so that the position adjustment of the sample 4 in the vertical direction is performed in response to the detected result of the means 18.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_JPS6064238A
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
title X-RAY ANALYZING APPARATUS USING ELECTRON BEAM
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-17T05%3A35%3A56IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=SATOU%20MITSUYOSHI&rft.date=1985-04-12&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJPS6064238A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true