X-RAY ANALYZING APPARATUS USING ELECTRON BEAM

PURPOSE:To perform accurate surface analysis even though irregularity is present on the surface of a sample, by judging the height of the position of the sample surface at every time the surface analysis of each minute surface is performed, and adjusting the height. CONSTITUTION:A detecting means 18...

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Bibliographische Detailangaben
1. Verfasser:	SATOU MITSUYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PURPOSE:To perform accurate surface analysis even though irregularity is present on the surface of a sample, by judging the height of the position of the sample surface at every time the surface analysis of each minute surface is performed, and adjusting the height. CONSTITUTION:A detecting means 18 detects the polarity of a minute surface 4a in the vertical direction based on the X ray intensity data of each minute surface of a sample 4. A position adjusting means 15 performs the position adjustment of the surface of a sample 4 in the vertical direction. A control means 19 controls the means 15 every time the X ray data of each minute surface 4a is obtained, so that the position adjustment of the sample 4 in the vertical direction is performed in response to the detected result of the means 18.