MANUFACTURE OF SLIGHTLY HALOGENATED SILANE OR MONOSILANE
PURPOSE:To manufacture efficiently a slightly halogenated silane or monosilane at a low cost by bringing a halogenosilane into contact with a specified polyamine compound. CONSTITUTION:A polyamine compound such as ethylenediamine is dissolved in a solvent to prepare a soln. A carrier such as activat...
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| creator | HIRASHIMA TAKEYUKI KOGA SHINICHIROU OZAKI YASUTAKA |
| description | PURPOSE:To manufacture efficiently a slightly halogenated silane or monosilane at a low cost by bringing a halogenosilane into contact with a specified polyamine compound. CONSTITUTION:A polyamine compound such as ethylenediamine is dissolved in a solvent to prepare a soln. A carrier such as activated carbon, alumina or silica- alumina is dipped in the soln. and dried. A halogenosilane represented by a formula SiHX3, SiH2X2 or SiH3X (where X is halogen) is brought into contact with the carrier having the deposited polyamine compound at 25-350 deg.C for 0.1-60sec. A slightly halogenated silane or monosilane can be manufactured without producing a silane of higher order as a by-product. |
| format | Patent |
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CONSTITUTION:A polyamine compound such as ethylenediamine is dissolved in a solvent to prepare a soln. A carrier such as activated carbon, alumina or silica- alumina is dipped in the soln. and dried. A halogenosilane represented by a formula SiHX3, SiH2X2 or SiH3X (where X is halogen) is brought into contact with the carrier having the deposited polyamine compound at 25-350 deg.C for 0.1-60sec. A slightly halogenated silane or monosilane can be manufactured without producing a silane of higher order as a by-product.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL THEIR RELEVANT APPARATUS TRANSPORTING |
| title | MANUFACTURE OF SLIGHTLY HALOGENATED SILANE OR MONOSILANE |
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