MANUFACTURE OF SLIGHTLY HALOGENATED SILANE OR MONOSILANE

PURPOSE:To manufacture efficiently a slightly halogenated silane or monosilane at a low cost by bringing a halogenosilane into contact with a specified polyamine compound. CONSTITUTION:A polyamine compound such as ethylenediamine is dissolved in a solvent to prepare a soln. A carrier such as activat...

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Bibliographische Detailangaben
Hauptverfasser:	HIRASHIMA TAKEYUKI, KOGA SHINICHIROU, OZAKI YASUTAKA
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE:To manufacture efficiently a slightly halogenated silane or monosilane at a low cost by bringing a halogenosilane into contact with a specified polyamine compound. CONSTITUTION:A polyamine compound such as ethylenediamine is dissolved in a solvent to prepare a soln. A carrier such as activated carbon, alumina or silica- alumina is dipped in the soln. and dried. A halogenosilane represented by a formula SiHX3, SiH2X2 or SiH3X (where X is halogen) is brought into contact with the carrier having the deposited polyamine compound at 25-350 deg.C for 0.1-60sec. A slightly halogenated silane or monosilane can be manufactured without producing a silane of higher order as a by-product.