RECIPROCATING CYLINDER FOR VACUUM APPARATUS

PURPOSE:To reduce adverse effect on the degree of vacuum in a vacuum vessel by fixedly securing a vacuum chamber connected to a vacuum pump to a cylinder and providing a rod penetrating the vacuum chamber through an O-ring. CONSTITUTION:A vacuum chamber 14 is fixedly secured to a cylinder 5, and a v...

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Bibliographische Detailangaben
Hauptverfasser:	SAEKI HIROSHI, OONISHI YOUICHI
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR FLUID-PRESSURE ACTUATORS FLUID-PRESSURE ACTUATORS, e.g. SERVO-MOTORS HEATING HYDRAULICS OR PNEUMATICS IN GENERAL LIGHTING MECHANICAL ENGINEERING SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	PURPOSE:To reduce adverse effect on the degree of vacuum in a vacuum vessel by fixedly securing a vacuum chamber connected to a vacuum pump to a cylinder and providing a rod penetrating the vacuum chamber through an O-ring. CONSTITUTION:A vacuum chamber 14 is fixedly secured to a cylinder 5, and a vacuum pump 17 is connected to the vacuum chamber 14, and a rod 8 penetrates the vacuum chamber 14 through an O-ring 15. Thus constructed, the amount of lubricant in the region of the rod 8 corresponding to the stroke can be eliminated by gasification. Consequently, adverse effect on the degree of vacuum in the vacuum chamber can be reduced.