JPS6041039B

PURPOSE:To obtain a smooth thin film having a large area, little defects and no segregation in the composition, by forming under prescribed conditions an oxide single crystal seed at one end of a thin amorphous oxide film having a specified composition and by carrying out successive recrystallizatio...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HASHIMOTO SUSUMU, SHIMANUKI SENJI
Format: Patent
Sprache:eng
Schlagworte:
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