X-RAY EXPOSING UNIT

PURPOSE:To eliminate the ununiformity in intensity of X-rays by vibrating or oscillating relatively a solar slit and an object to be exposed while keeping them in parallel during the exposure. CONSTITUTION:Vibrators 9 and 10 connected to a solar slit 4 are driven. The slit 4 is maintained in paralle...

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Bibliographische Detailangaben
1. Verfasser:	MURAMOTO MASATO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PURPOSE:To eliminate the ununiformity in intensity of X-rays by vibrating or oscillating relatively a solar slit and an object to be exposed while keeping them in parallel during the exposure. CONSTITUTION:Vibrators 9 and 10 connected to a solar slit 4 are driven. The slit 4 is maintained in parallel with a wafer 7 and vibrated finely in the two directions rectangular to each other in the X-Y plane. As a result, each region on the wafer 7 is placed alternately below the partition portion 2 and below the aperture portion 1 so that the amount of X-rays applied during the exposure is uniformized for each portion on the wafer 7. Accordingly, the intensity distribution of X-rays on the wafer 7 becomes effectively uniform.