GAS DISCHARGING DEVICE IN VACUUM DISPOSER

PURPOSE:To make it possible to enhance the life of a vacuum type gas discharging device, by providing such an arrangement that substitution is made with inert gas having a pressure higher than the atmospheric pressure on the atmosphere discharge side of an auxiliary pump in the gas discharging devic...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	IKEDA KOUJI, TSUKADA TSUTOMU, ASAISHI ISAO, KOIZUMI TATSUNORI
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS BLASTING CHEMISTRY CRYSTAL GROWTH ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING METALLURGY NON-POSITIVE DISPLACEMENT PUMPS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS REFINING BY ZONE-MELTING OF MATERIAL ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS SEMICONDUCTOR DEVICES SEPARATION SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH TRANSPORTING UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL WEAPONS
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Beschreibung
Zusammenfassung:	PURPOSE:To make it possible to enhance the life of a vacuum type gas discharging device, by providing such an arrangement that substitution is made with inert gas having a pressure higher than the atmospheric pressure on the atmosphere discharge side of an auxiliary pump in the gas discharging device, and a dry type chlorine gas absorbing tower is provided in the atmosphere discharge pipe of the device. CONSTITUTION:A gas discharging device in a vacuum disposer discharges discharge gas from a booster pump 204, and nitrogen gas is introduced into a container of an oil rotary pump 208 through a purge valve 209 with the internal pressure of the container of the oil rotary pump being set at a value higher than the atmospheric pressure. Further, the discharge port of the oil rotary pump is connected with a gas chamber in a dry type absorbing tower 210 for selectively absorbing chlorine gas, particularly BCl3 gas, through a pipe line 211 which is shut off. Accordingly, there is no such a risk that oil in the oil rotary pump is polluted with discharge gas, and as well the atmospheric air is prevented from being polluted with the discharge gas.