PRODUCTION OF THIN FILM MAGNETIC HEAD

PURPOSE:To obtain a thin film magnetic head having a low step structure at a high yield without deteriorating the magnetic characteristic thereof by using a sintered body having a grain size of a specific length or below and Vickers hardness in a limited range for a substrate and adopting a Co-base...

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Bibliographische Detailangaben
1. Verfasser:	KAWASE MASAHARU
Format:	Patent
Sprache:	eng
Schlagworte:	INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER PHYSICS
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Beschreibung
Zusammenfassung:	PURPOSE:To obtain a thin film magnetic head having a low step structure at a high yield without deteriorating the magnetic characteristic thereof by using a sintered body having a grain size of a specific length or below and Vickers hardness in a limited range for a substrate and adopting a Co-base amorphous alloy for the magnetic film. CONSTITUTION:An Al2O3-TiO2 substrate having 1,000 Vickers hardness and 5mm. grian size is used and recesses are provided thereto by a dicer of which the blade is worked to a prescribed shape. A thin film of a Co-Nb or Co-Nb-Zr alloy is formed by a sputtering method under 4X10Torr residual gaseous pressure and