ION SOURCE ANGLE REGULATOR FOR NEUTRAL PARTICLE INCIDENT DEVICE

Bibliographische Detailangaben

Hauptverfasser:	KURIYAMA MASAAKI, GOTOU SADANOBU, OBARA YOSHIHIRO, MATSUDA SHINZABUROU, MAEDA HIROSHI, HAGITANI TAKASHI, KONDOU OSAHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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