SEMICONDUCTOR MANUFACTURING APPARATUS

PURPOSE:To improve the accuracy of image recognition and the workability by detecting the volume of light actually radiated to a semiconductor device and by automatically controlling the light volume in a predetermined state. CONSTITUTION:An IC chip 11 located on a table 10 is radiated with a predetermined volume of light by a lighting unit 13. An image data is generated by an ITV 12 and supplied to a CPU 15 through a controller 14. The volume of light actually emitted by the lighting unit 13 is detected by 17 and converted by an A/D converter 18 to be supplied to the CPU 15. These two inputs to the CPU 15 are compared thereby and the comparison data, converted by an A/D converter 19, is supplied to the lighting unit 13 in which the volume of light is automatically set to the predetermined volume based on the comparison data. Even when the light volume is changed due to deterioration of the apparatus or the like, the light volume can be automatically adjusted to the desired volume. Therefore, the accuracy of image recognition, the workability and the operability can be improved effectively.