METHOD AND DEVICE FOR INSPECTION OF INSULATING THIN FILM

PURPOSE:To decide on an insulating thin film in a short time with high precision by measuring the dielectric strength of the insulating thin film at plural temperatures. CONSTITUTION:A power source means 11 supplies a constant current to a sample 6 through a probing means 10, and a voltage measuring...

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Bibliographische Detailangaben
Hauptverfasser:	YOSHIDA TOORU, ISHIDA TOSHIHARU, KOYAMA SHINICHIROU, OKINO HIRONOBU, TAKAHASHI TETSUYA
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PURPOSE:To decide on an insulating thin film in a short time with high precision by measuring the dielectric strength of the insulating thin film at plural temperatures. CONSTITUTION:A power source means 11 supplies a constant current to a sample 6 through a probing means 10, and a voltage measuring means 12 measures voltages at the 1st and the 2nd temperatures. Then, they are stored in a storage means 13 and an arithmetic and judging means 14 judges whether the insulating thin film 7 is normal or not on the basis of those data.