METHOD AND DEVICE FOR PRODUCING COMPOUND SINGLE CRYSTAL WITH HIGH DISSOCIATION PRESSURE

PURPOSE:To suppress thermal decomposition on the surface of a III-V group compd. single crystal and to prevent generation of a defect in production of said single crystal by a melt-pulling up method by maintaining the vapor atmosphere of a volatile element (V group element) in the sealing space abov...

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Bibliographische Detailangaben
Hauptverfasser: KASHIYANAGI YUUZOU, OZAWA SHIYOUICHI, AZUMA KATSUMI, KIJIMA TAKASHI
Format: Patent
Sprache:eng
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