DEVICE FOR PULLING UP SINGLE CRYSTAL

PURPOSE:To control easily the temp. in a vertical direction to a prescribed temp. distribution by using two-stage heaters which are divided to upper and lower heaters for the heater in the furnace on the side face of a device for pulling up a single crystal by a Czochralski method and consisting eac...

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Bibliographische Detailangaben
Hauptverfasser: NAKAI RIYUUSUKE, KAWASAKI AKIHISA, HOSHIKAWA KEIGO, KOTANI TOSHIHIRO, MIYAZAWA SHINTAROU, KISHI MASAO
Format: Patent
Sprache:eng
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