DEVICE FOR PULLING UP SINGLE CRYSTAL

PURPOSE:To control easily the temp. in a vertical direction to a prescribed temp. distribution by using two-stage heaters which are divided to upper and lower heaters for the heater in the furnace on the side face of a device for pulling up a single crystal by a Czochralski method and consisting eac...

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Bibliographische Detailangaben
Hauptverfasser:	NAKAI RIYUUSUKE, KAWASAKI AKIHISA, HOSHIKAWA KEIGO, KOTANI TOSHIHIRO, MIYAZAWA SHINTAROU, KISHI MASAO
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CRYSTAL GROWTH ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PURPOSE:To control easily the temp. in a vertical direction to a prescribed temp. distribution by using two-stage heaters which are divided to upper and lower heaters for the heater in the furnace on the side face of a device for pulling up a single crystal by a Czochralski method and consisting each heater of a rectangular waveform coil of which the transverse direction is made vertical. CONSTITUTION:A heater in the furnace on the side face of a device for pulling up a single crystal 7 by a Czochralski method is divided to upper and lower heaters in a part on the side face of a crucible 3. More specifically, the heater is divided to two stages; an upper heater 11 and a lower heater 12. The heater 11 consists of a cylindrical rectangular waveform coil 13 wound along the outside on the side face of the crucible 3 and the heater 12 consists of a funnel- shaped rectangular waveform coil 16 wound along the outside on the side face and base of the crucible 3.