MEASURING DEVICE OF SHAPE OF IN-PROCESS CUT FACE

PURPOSE:To improve the precision of measurement, by operating the shape of a cut face on a basis of the output from a contactless displacement meter, which is operated in response to the deformation of a grinder blade cutting a sample, and a specific conversion factor. CONSTITUTION:The output signal from a contacless displacement meter 3 which is operated in response to deformation of a grinder blade 2 cutting the sample is inputted to an operator 6 through an amplifier 8 and etc., and the shape of the cut face is operated on a basis of this output and an independently attained conversion factor and is displayed on a display 7. In this case, the conversion factor is preliminarily calculated on a basis of the shape of the cut face in the cutting direction, the three-dimensional shape of the cut face where the cutting direction and the direction orthogonal to it are used as parameters, and the actual measured value of the quantity of deformation or the grinder blade, and this conversion factor is inputted to the operator 6. The quantity of camber is attained by compound regression analysis in consideration of the interaction up to the secondary term. Thus, the shape of the cut face is attained within a measurement error.