SURFACE ACOUSTIC WAVE RESONATOR
PURPOSE:To prevent spurious radiation of a reflected wave from being produced, by making a straight line etching part of an etching pattern of a surface wave reflecting electrode longer than the opposing lead interval of an interdigital electrode. CONSTITUTION:The reflecting part of a surface wave r...
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Zusammenfassung: | PURPOSE:To prevent spurious radiation of a reflected wave from being produced, by making a straight line etching part of an etching pattern of a surface wave reflecting electrode longer than the opposing lead interval of an interdigital electrode. CONSTITUTION:The reflecting part of a surface wave required characteristically in case of the surface wave reflecting electrode 50 of a surface acoustic wave resonator 60 is a part of an interval L between opposing leads 441 of the interdigital electrode 44. Thus, it is required to assure the part of the required interval L in the pattern etching of the surface wave reflecting electrode 50. In the etching pattern of the surface wave reflecting electrode 50, the straight line etching part corresponding to the interval L is formed longer than the interval L. In etching a mask pattern of a surface wave reflecting electrode 503 shown in solid lines, the surface wave reflecting electrode as shown in dotted lines is obtained and the part of the interval L required for the reflection of the surface wave is assured sufficiently accurately. Thus, no spurious radiation of the reflecting wave is produced. |
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