MANUFACTURE OF LONGITUDIANL OSCILLATION TYPE PIEZOELECTRIC OSCILLATOR

PURPOSE:To improve shape precision and to reduce variance in characteristics by forming a main oscillation part which performs longitudinal oscillation and a supporting part in one body by photoetching. CONSTITUTION:A piezoelectric wafer is etched into the outward shape of a piezoelectric oscillator. Then, a thin conductive film 37 is formed over the nearly entire surface of an oscillator part 31 in a process (E), and photoresists 38 and 38' are formed in electrode shapes in a process (F); and thin conductive films 32, 32', and 38' are etched by using the photoresists 38 and 38' as corrosion resistant films in a process (G), and the photoresists 38 and 38' are separated in a process (H). Thus, the electrodes are formed in the photoetching process, so the shape precision is high and the variance in characteristics is less.