CONVEYOR FOR WAFER

PURPOSE:To shorten the waiting time for conveyance to a crossed position of the wafer by a carrier means by setting up a turning arm to the carrier means so that the rotary locus of the center of a gripper can be crossed at two positions different from the central axis of the carrier means. CONSTITU...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KANAI NORIO, KAN YOSHIJI, YAMAMOTO NORIAKI, IKUHARA SHIYOUJI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PURPOSE:To shorten the waiting time for conveyance to a crossed position of the wafer by a carrier means by setting up a turning arm to the carrier means so that the rotary locus of the center of a gripper can be crossed at two positions different from the central axis of the carrier means. CONSTITUTION:The wafer conveyor is constituted by a conveyor belt 10 placing and conveying the wafer 30 and the turning arm 13, one end thereof is provided with the gripper 11 and the other end thereof with a turning gear 12. The arm 12 is set up to the belt 10 so that the rotary locus of the center of the device 11 can be crossed at two positions 21, 22 different from the central axis of the belt 10. Accordingly, waiting time for conveyance necessary for the conveyance of the wafer to the belt 10 as the carrier means from a table 40 as another device and the conveyance of the wafer to the table 40 from the belt 10 is shortened.