X-RAY SOURCE FOR X-RAY LITHOGRAPHY

PURPOSE:To remove thermal distortion of a target, and to obtain a fine X-ray beam by a method wherein a linear cathode stretched perpendicularly to the longitudinally axial direction is wrapped in a Wehnelt electrode having the ?- shape section, an anode having a slot opening at the center is provided at the position to face thereto interposing the cathode between them, a fixed target is arranged through an electrostatic lens system interposing the prescribed distance between them, and three pieces of X-ray sources constructed in such a way are bundled interposing the angles of 120 deg. mutually. CONSTITUTION:One side of a linear cathode 2 stretched perpendicularly to the longitudinally axial direction is wrapped in a Wehnelt electrode 1 having the ?- shape section, and an anode 3 having a slot opening at the center is arranged at the side to face thereto interposing the cathode 2 between them. An electrostatic lens system 4 consisting of lenses 4a-4c is provided at the rear of the cathode 3, and a fixed target 5 is arranged at the rear thereof. After then, electric power sources 6-8 are connected respectively to the electrodes 1, 2 and the lens system 4b. An X-ray source unit assembled body is constructed in such a way, and the assembled bodies 9a, 10a, 11a thereof are bundled having the angles of 120 deg..