INFRARED-RAY DETECTING ELEMENT

INFRARED-RAY DETECTING ELEMENT

PURPOSE:To improve mechanical strength, by carbonizing a part of a substrate so as to obtain an endothermic layer. CONSTITUTION:Plasma is imparted to a part of the center of substrate 1. The surface is carbonized by treatment such as sputtering and an endothermic layer 4 is formed. Detecting films 2...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: UMETSU MASAO
Format: Patent
Sprache:eng
Schlagworte:
COLORIMETRY
ELECTRICITY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
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Beschreibung
Zusammenfassung:PURPOSE:To improve mechanical strength, by carbonizing a part of a substrate so as to obtain an endothermic layer. CONSTITUTION:Plasma is imparted to a part of the center of substrate 1. The surface is carbonized by treatment such as sputtering and an endothermic layer 4 is formed. Detecting films 2 and electrodes 5 comprising a thermoelectric material and the like for thermopiles are provided on the reverse side of the substrate by vacuum evaporation and the like. Thus a thermopile is obtained. For the substrate 1, plastics, organic materials, and the like such as polyimide and polyester are suitable. In this method, a metal film is not specially required to be formed, and mechanical strength and reliability can be improved.