ULTRASONIC MICROSCOPE APPARATUS

PURPOSE:To make it possible to measure corresponding acoustic velocity by separating each mode when a multi-mode leak elastic wave is present, by subjecting the wave form of focusing ultrasonic beam detection output to Fourier transformation to perform the analysis thereof. CONSTITUTION:An object 10 to be inspected which moves to the axial direction Z of ultrasonic beam in integral relation to a moving apparatus 11 and revolved around a shaft is scanned by linear focusing ultrasonic beam through a liquid sound field medium 4 from the focusing ultrasonic transducer 3 of an ultrasonic microscope and the acoustic velocity characteristic wave form of the object 10 to be inspected is recorded by a recording apparatus 13. When this recording is subjected to frequency analysis while subjected to Fourier transformation by a high speed Fourier transformation analyzer, each mode is separated even if a multi-mode leak elastic wave is present and corresponding acoustic velocity can be measured.