PATTERN FORMING DEVICE IN CONTINUOUS THIN FILM FORMING DEVICE

PURPOSE:To provide a titled device which enables continuous formation of a thin film having a distinct horizontal stripe pattern by providing a mask of a magnetic material along the film forming surface of a belt-like material, providing a magnet on the rear of the belt-like material and attracting...

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1. Verfasser: SUWA HIDENORI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To provide a titled device which enables continuous formation of a thin film having a distinct horizontal stripe pattern by providing a mask of a magnetic material along the film forming surface of a belt-like material, providing a magnet on the rear of the belt-like material and attracting the mask to the belt-like material in tight contact therewith. CONSTITUTION:A mask 5 of a magnetic material provided with through-holes 4 for forming a pattern is provided freely travelably together with a belt-like material 3 in order to form the stripe pattern in the horizontal direction of the material 3 on the thin film forming surface 3a of the material 3 in a vacuum chamber 2. A magnet 6 such as an electromagnet or the like is provided on the rear of the material 3 and the mask 5 is brought into tight contact with the surface 3a of the material 3 by the effect of magnetic lines 6a. The horizontal sripe pattern of the thin film formed continuously on the material 3 is made distinct by such device. Since an electrode pattern, etc. are simultaneously formed in the stage of forming the film, the post treatment stage such as etching is omitted.