VACUUM DEPOSITION DEVICE HAVING MATERIAL CONVEYING MECHANISM

PURPOSE:To reduce considerably the evacuating time with replacement of a sample in a device which rotates and holds a sample of a cylindrical work and subjects the sample to vapor deposition by providing a sample conveying. mechanism for putting the sample into and from a vacuum deposition vessel which is kept evacuated at all times. CONSTITUTION:A sample 37 is fixed to units 38, 39, and is put into a preliminary vacuum vessel 34, and after lowering, the vesseel 34 is closed hermetically and the inside thereof is evacuated to a vacuum with a device 55. The inside of a vacuum deposition vessel 12 connecting to the vessel 34 by a pipeline 23 is preliminarily evacuated with a device 53 by closing the pipeline 23 with a shutoff mechanism 27. When the vessel 34 attains a prescribed vacuum degree, a vapor source 11 is operated and the mechanism 27 is released to open the pipeline 23: at the same time, the unit 38 is gripped with a chuck 35 and is transferred along straight guides 32, 20 onto the source 11 in the vessel 12. The connector 58 at the top end of the unit meshes with the connector 61 of a rotary introducing machine, thereby rotating the sample 37. The chuck 35 releases the unit 38 and returns into the vessel 34. The pipeline 23 is then closed and the vapor deposition is performed in the vessel 12. The pipeline 23 is opened upon completion of the vapor deposition and the unit 38 is returned by the chuck 35 to the vessel 34. The unit 39 is thereafter operated similarly.