DETECTING METHOD OF POSITION OF SEMICONDUCTOR PELLET

PURPOSE:To detect detection displacement to X-Y axes positively even in a rectangular semiconductor pellet, and to ensure wire bonding causing no positional displacement by setting up positioning points at three corner sections in a semiconductor pellet and detecting the position of the pellet. CONSTITUTION:Each electrode 4 and patterns 5, 6, 7 at three corner sections are formed on the upper surface of a semiconductor pellet 11. These patterns 5, 6, 7 function as first and second positioning points Q1, Q2 at corner sections along the side of a Y axis and second and third positioning points Q2, Q3 at corner sections along the side of an X axis. The first positioning point Q1 is detected by an industrial TV camera, etc., displacement in the directions of X-Y axes is detected, and the second positioning point Q2 is detected. Consequently, length l1 between Q1 and Q2 is computed by an electronic computer, and detection displacement effective to the Y axis side longer than x1 is made sure. The third positioning point Q3 is detected, length l2 between Q2 and Q3 is computed by the electronic computer, and detection displacement effective to the X axis side longer than y2 is made sure.