POSITIONING OF ORIENTATION FLAT

PURPOSE:To easily position the orientation flat even in case size of orientation flat is different from a wafer diameter, by changing a belt carrying force and by giving a rotating force to wafers to be carried while they are placed on the belt. CONSTITUTION:The belts 12a, 12b are rotatingly driven clockwise by a driving apparatus 10 and the belt 34 is rotatingly driven counterclockwise through the gears 30a, 30b. The level of belt 34 rotating as described above becomes equal to the level of belts 12a, 12b by lifing a support means 31 by the lifting apparatus 36 and a stopper 35 is protruded above the level of belts 12a, 12b. The wafer 20 placed at the one end of the belts 12a, 12b under such condition is given a rotating force by a combining force with an opposing transferring force of belt 34 during the transfer. As a result, the wafer 20 is guided by the guide 34 which it is rotated until the orientation flat 21 abuts against the stopper 35 in such a condition that transfer is being stopped, in case the orientation flat 21 to be transferred to the stopper 35 does not abut against the stopper 35.