MANUFACTURE OF SEMICONDUCTOR DEVICE

PURPOSE:To allow a cutting process for a wiring in a short time and a clean manner without the necessity of large current conduction into another element and of providing a pad for cutting by a method wherein, via an insulation film coating the wiring, a part of the metal or alloy thereof is sublima...

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Bibliographische Detailangaben
1. Verfasser: SATOU NORIAKI
Format: Patent
Sprache:eng
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