ULTRASONIC MICROSCOPE
PURPOSE:To measure easily the anisotropy of a crystal or the acoustic velocity of leakage elastic surface waves propagated in an optional direction of an optional crystal cut face, by using ultrasonic beams, which are converged linearly, in an ultrasonic microscope. CONSTITUTION:A plane wave is radi...
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Zusammenfassung: | PURPOSE:To measure easily the anisotropy of a crystal or the acoustic velocity of leakage elastic surface waves propagated in an optional direction of an optional crystal cut face, by using ultrasonic beams, which are converged linearly, in an ultrasonic microscope. CONSTITUTION:A plane wave is radiated in a solid-state acoustic field medium 21 from a transducer 20 formed in one end of the solid-state acoustic field medium 21. The plane wave is converged by a linearly converging lens part 22 which is formed to a shape like a cylindrical concave by optical polishing and has a 1/4 wavelength reflection preventing film 23 mounted, and this plane wave becomes a linearly converged ultrasonic beam 26 and is irradiated to a material 27 to be examined through a liquid acoustic field medium. The material 27 to be examined is moved in the Z-axis direction to measure a V(Z) curve. The velocity of leakage elastic surface waves is measured on a basis of the expression of relation between a perido DELTAZ of the tip and the velocity of leakage elastic surface waves for the solid. The material 27 to be examined is rotated around the beam axis (Z axis) at an angle theta successively to repeat the similary measurement, thereby measuring the anisotropy around the Z axis as a difference of value of the velocity of leakage elastic surface waves. |
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