INSTALLATION FOR SUPPLYING ULTRAPURIFIED WATER

PURPOSE:To continually supply ultrapurified water having specific resistivity above 15MOMEGA and not-containing fine particles, by providing ultrafiltration cartridges in piping for supplying ultrapurified water and piping for recovering it, and connecting their inlets for water to be purified to th...

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Bibliographische Detailangaben
1. Verfasser: HASHINO YASUO
Format: Patent
Sprache:eng
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