INSTALLATION FOR SUPPLYING ULTRAPURIFIED WATER

PURPOSE:To continually supply ultrapurified water having specific resistivity above 15MOMEGA and not-containing fine particles, by providing ultrafiltration cartridges in piping for supplying ultrapurified water and piping for recovering it, and connecting their inlets for water to be purified to the supply piping and the recovering piping. CONSTITUTION:A part of ultrapurified water fed through supply piping 1 is forcedly introduced through branched piping 2 into an ultrafiltration cartridge 3. A filtrate is withdrawn through a filtrate opening 4 and then used. On the other hand, the remainder of the ultrapurified water flowing at the raw water side of the ultrafiltration cartridge 3 without being filtered is returned to recovering piping 5. When the ultrapurified filtrate is not used, a cock 6 is closed to return all of raw water supplied through the supply piping 1 to the recovering piping 5. The raw water forcedly poured into the ultrafiltration cartridge 3 through its raw water inlet 7 is let flow along the inside of hollow fiber membrances 8 toward an outlet 9 for discharging the raw water.