METHOD FOR EMISSION SPECTROCHEMICAL ANALYSIS

PURPOSE:To make an emission spectrochemical analysis keeping the surface of a sample to be analyzed uniform and in a clean state, by moving the sample to be analyzed to a measuring position without exposing to the atmosphere after sputtering the surface by causing a glow discharge using the sample t...

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Bibliographische Detailangaben
Hauptverfasser:	OOHASHI ZENJI, SUMIYAMA KOUZOU, YAMAMOTO YASUKO
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PURPOSE:To make an emission spectrochemical analysis keeping the surface of a sample to be analyzed uniform and in a clean state, by moving the sample to be analyzed to a measuring position without exposing to the atmosphere after sputtering the surface by causing a glow discharge using the sample to be analyzed as a cathode. CONSTITUTION:A sample to be analyzed 1 is placed at a position A of a rotating sample stand 24 and argon gas is introduced from an introducting pipe 4 and then, glow discharge is caused maintaining an anode cylinder 2a in 4 Torr. low vacuum by evacuating from exhaust openings 6, 8. The surface of the sample to be analyzed is sputtered in a stainless and uniform state by the cathode sputtering development. Hereafter, the stand 24 is rotated by rotating a shaft 24a and the sample to be analyzed is moved to a position B and then, an emission spectrochemical analysis is made. Accordingly, the measuring face of the sample is not exposed to the atmosphere at the time of moving the sample to be analyzed because the atmosphere in a sample room 18 has been evacuated.