ELECTRICALLY CONDUCTIVE GLASS AND ITS PRODUCTION

PURPOSE:After an electrically conductive coating film is formed on glass plate surfaces, hard coating films of oxide, nitride or carbide of a specific metal are formed thereon to produce conductive glass with high wearing and chemical resistance. CONSTITUTION:A glass plate 2 coated with an electrically conductive coating film on its surfaces is put on the support 9 in the vacuum dome 1. The glass plate is used as the anode and the air in the dome 1 is evacuated with a vacuum pump 5, then, an inert gas such as nitrogen or carbon dioxide gas is introduced through the pipe 7 into the dome 1. An acceleration voltage from the high- frequency electric source 8 is applied to the cathode 3 of an oxide of Si, Ti or Al to effect sputtering to form a hard coating film of oxide, nitride or carbide of Si, Ti or Al on the conductive film of the glass 2 in a thickness of 1,000- 1,500Angstrom .