DISPLAYING METHOD FOR DEFECT POSITION

PURPOSE:To discriminate the repair defects while a printed substrate is held covered with a defect displaying sheet by opening windows corresponding to the defect positions of the patterns on the printed substrate in the defective position displaying sheet. CONSTITUTION:The laser beams from a laser...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KURITA KATSUYUKI, YAGI KAZUO, MUTOU AKIFUMI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PURPOSE:To discriminate the repair defects while a printed substrate is held covered with a defect displaying sheet by opening windows corresponding to the defect positions of the patterns on the printed substrate in the defective position displaying sheet. CONSTITUTION:The laser beams from a laser 3 are condensed via a beam expander 4, a rotary mirror 5, and a lens 6 onto the pattern 2 on a printed substrate 1. The reflected light is made incident via a lens 6, the mirror 5, a half mirror 7 and a lens 8 to a photodetector 9. The output thereof is binary coded with a comparator 11 via an amplifier 10. The entire surface of the substrate 1 is scanned by the movement of an XY table. The video signal thereof is processed with a defect detecting circuit 12, and the addresses of defects are stored in a memory 13. A controller 14 reads the addresses of the defects, and opens windows to a defect displaying sheet 21 by operating a puncher 20. The sheet 21 is superposed on the substrate 1, whereby the defects are discriminated and repaired as they are.