MULTI-NOZZLE PLATE FOR LIQUID JET AND MANUFACTURE THEREOF

PURPOSE:To economically manufacture a highly accurate multi-nozzle plate for liquid jet by a method in which plural V-grooves are formed on a single crystal plate by an anisotropic etching, two single crystal plates so treated are joined with each other by facing their V-grooves, and then they are sliced in the orthogonal direction to the V-grooves. CONSTITUTION:A single crystal substrate (e.g., Si semiconductor substrate) is subjected to an anitropic etching treatment for its (100) plane to form a substrate 10 with plural V-grooves, having both wall faces consisting of (111) planes. Then, two substrates thus obtained are joined with each other by facing their V-grooves, and then they are sliced in the orthogonal direction to the V-grooves to form a multi-nozzle plate 20 having a high accuracy.