JPS582200B

A rotary head is provided with supply chambers near the center of rotation communicating with slot-like channels extending radially to a surrounding annular space. Substrates are set into holders, such as dovetail guides in the channel walls to expose surfaces to the liquid that flows by through the...

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Bibliographische Detailangaben
Hauptverfasser: ROORENTSU SHUMITSUTO, ERIZABESU BAUZAA, MARUTEINA FURITSUKU, KAARU JIIKUFURIIDO REHINAA
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A rotary head is provided with supply chambers near the center of rotation communicating with slot-like channels extending radially to a surrounding annular space. Substrates are set into holders, such as dovetail guides in the channel walls to expose surfaces to the liquid that flows by through the channels from the supply chambers when the head is set into rotation. The used liquid, after it reaches the annular space, flows down into a catch basin at the bottom of a surrounding casing, which casing also has an opening at the top for loading the supply chambers.