TRANSPORTING SYSTEM FOR WAFER

PURPOSE:To obtain a unit capable of supply and delivery with high efficiency by a method wherein a carrier containing a large number of vertically arranged semiconductor wafers is accommodated in a self-propelled vehicle, and after passing it under a cleaning shower, is transferred onto a mount loca...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAZAMANO SHIGEKI, SAITOU TAKAYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!