TRANSPORTING SYSTEM FOR WAFER

PURPOSE:To obtain a unit capable of supply and delivery with high efficiency by a method wherein a carrier containing a large number of vertically arranged semiconductor wafers is accommodated in a self-propelled vehicle, and after passing it under a cleaning shower, is transferred onto a mount located in a housing which consitutes a storage unit for transport for a thorough cleaning before it is unloaded back into the vehicle for transportation to the next stage. CONSTITUTION:A self-propelled vehicle 13 housing a carrier 22 with a large number of semiconductor wafers 21 arranged vertically therein travels on a railway and passes under a cleaning shower 15 with its shutter open and shut. Next, the vehicle 13 arrives at a wafer housing chamber 18 constituting a storage for transported units 11, when a robot works, transferring the carrier 22 onto a mount 24 for cleaning by a shower 19 with the highest cleaning capability. The robot then puts the carrier 22 back into the hermetically sealable self-propelled vehicle 25, which travels through under the next cleaning shower 27 with the cover open and then further to a next stage with the cover closed.