WAFER PUSH-UP DEVICE

PURPOSE:To accomplish with smoothness the processes of mounting on a table and pushing up a set wafer by a method wherein an axle is provided with a piece insensitive to actuation in a push-up device consisting of a driver lacking stability in its initial period of operation and a vertically movable axle with a table mounted thereon. CONSTITUTION:An air cylinder 16 as a driving unit is attached to a bent bracket 14 and a bracket 15 positioned along the bracket 14 supports a table holder 11 and a reserve chamber 10 surrounding the holder 11. Between the air cylinder 16 and holder 11, an axle 20 capable of vertical motion is arranged with the intermediary of a piston 17 protruding from the cylinder 16 and a coupling 18. In such a design, however, motion is unstable at the beginning of drive. The unsatisfactory condition is corrected when a guide 27 is provided over the coupling 18, penetrated through by the axle 20. The guide 27 is arranged on the bracket 15 and is provided with a guide hole 26. Vertical sliding is ensured by a spring 32, restricted by a stopper 31.