APPARATUS FOR GENERATING NEUTRALIZED ION BEAM

A neutralised low energy ion beam is produced by forming a plasma between an anode (13) and a cathode (14) and maintaining a grid (16) at a potential slightly more positive than the cathode (14) so that a beam containing positive ions and high energy primary electrons from the plasma passes through...

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Bibliographische Detailangaben
Hauptverfasser:	MOODEHAI HAIBURAMU, HARORUDO RICHIYAADO KAUFUMAN, JIEEMUZU MATSUKERU EDOUIN HAABAA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	A neutralised low energy ion beam is produced by forming a plasma between an anode (13) and a cathode (14) and maintaining a grid (16) at a potential slightly more positive than the cathode (14) so that a beam containing positive ions and high energy primary electrons from the plasma passes through the grid (16). A neutralised high energy ion beam is produced by directing a low energy beam containing charged particles of opposite polarity to that of the ions in an unneutralised high energy ion beam across the latter beam. The low energy beam may be one produced by a generator as described above or another ion source and an electron source (21).