SEMICONDUCTOR IC AND PROGRAMING METHOD THEREOF

PURPOSE:To perform a laser diffusion program having no thermal influence upon the same by a method wherein a programing circuit for power supply and two power supply pads are provided in addition to a programing circuit to perform the final diffusion of P utilizing the Joule heat of power supply. CONSTITUTION:Circuit programing elements 2a-2z and wirings are provided on an insulative film while another wirings common to elements 2a-2z and pads 14, 15 are further provided to connect to the other ends of the wiring of said elements 2a-2z and the power supply programing elements 10a-10z, common wirings and pads are provided. When a programing high resistant poly Si wiring is irradiated by laser, the wiring is preliminarily made low resistant by a laser power much lower than the damage threshold value then the poly Si wiring is supplied with minute current to accelerate diffusion by the self heating of the high resistant section attaining to satisfactorily low resistant value.