INSPECTING METHOD OF CONDUCTIVE PATTERN

PURPOSE:To detect disconnection of a pattern, by applying an AC signal to one end of a conductive pattern, applying different frequency signals to a conductive member which is electrostatically coupled with it on the pattern, and detecting the AC signal from the other end of the pattern. CONSTITUTION:Signals from the first electric poweer source 4 and the second electric power source 7 are AC signals whose voltage and frequency are different, and an electrostatic coupling conductive member 6 and each electrode 2 are electrostatically coupled. In case when an AC probe 8a is slide-moved in the direction as indicated with an arrow A, if the probe 8a is on a non-disconnection electrode, the AC signal from the first electric power source 4 is strongly detected in the probe 8a. On the other hand, if the probe 8a is on a disconnection electrode 2, the AC signal of the electric power source 4 appears only through floating capacity coupling, and rather than that, the AC signal from the electric power source 7 is detected by a frequency discriminator 8c through the coupling capacity from the electrostatic coupling conductive member 6, and in accordance with a voltage level recorded in a recorder 8d, disconnection can be detected.